Method and system for fabrication of a vertical fin-based field effect transistor

ABSTRACT

A method of fabricating a vertical fin-based field effect transistor (FET) includes providing a semiconductor substrate having a first surface and a second surface, the semiconductor substrate having a first conductivity type, epitaxially growing a first semiconductor layer on the first surface of the semiconductor substrate, the first semiconductor layer having the first conductivity type and including a drift layer and a graded doping layer on the drift layer, and epitaxially growing a second semiconductor layer having the first conductivity type on the graded doping layer. The method also includes forming a metal compound layer on the second semiconductor layer, forming a patterned hard mask layer on the metal compound layer, and etching the metal compound layer and the second semiconductor layer using the patterned hard mask layer as a mask exposing a surface of the graded doping layer to form a plurality of fins surrounded by a trench.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a division of U.S. patent application Ser. No. 16/929,926, filed on Jul. 15, 2020, which claims the benefit of and priority to U.S. Provisional Patent Application No. 62/877,224, filed on Jul. 22, 2019, the disclosures of which are hereby incorporated by reference in their entirety for all purposes.

TECHNICAL FIELD

The present invention relates to vertical fin-based field effect transistor (FET) devices with an improved combination of leakage current, maximum electric field, and on-resistance for a given threshold voltage.

BACKGROUND OF THE INVENTION

Power electronics are widely used in a variety of applications, including power conversion, electric motor drives, switching power supplies, lighting, etc. Power electronic devices such as transistors are commonly used in such power switching applications. The operation of the present generation of power transistor devices, particularly with high voltage (>600V) handling capability, is hampered by slow switching speeds, and high specific on-resistance.

Thus, there is a need in the art for power transistor devices exhibiting low capacitance, a low, positive threshold voltage, and low specific on-resistance along with high breakdown voltage.

SUMMARY OF THE INVENTION

Embodiments of the present invention provide novel vertical-fin-based FET devices and methods of fabricating such FET devices with improved specific on-resistance, leakage current and breakdown voltage.

In one embodiment, a transistor includes a substrate having a first surface and a second surface opposite the first surface, a drift region having a doped region on the first surface of the substrate and a graded doping region on the doped region, a semiconductor fin protruding from the graded doping region and comprising a metal compound layer at an upper portion of the semiconductor fin, a source metal contact on the metal compound layer, a gate layer having a bottom portion directly contacting the graded doping region, and a drain metal contact on the second surface of the substrate.

In another embodiment, a method of fabricating a vertical-fin-based field effect transistor (FET) is provided. The method may include providing a semiconductor substrate having a first surface and a second surface, the semiconductor substrate having a first conductivity type, epitaxially growing a first semiconductor layer on the first surface of the semiconductor substrate, the first semiconductor layer having the first conductivity type and including a drift layer and a graded doping layer on the drift layer, epitaxially growing a second semiconductor layer (also referred to as a fin conduction layer) having the first conductivity type on the graded doping layer, forming a metal compound layer on the second semiconductor layer, forming a patterned hard mask layer on the metal compound layer, and etching the metal layer and the second semiconductor layer (i.e., the fin conduction layer) using the patterned hard mask layer as a mask exposing a surface of the graded doping layer to form a plurality of fins that are surrounded by a trench. The method may also include epitaxially growing a third semiconductor layer having a second conductivity type opposite the first conductivity type in the trench, etching back the third semiconductor layer and planarizing the third semiconductor layer and exposing a sidewall portion of the fins, forming a first dielectric layer on the planarized third semiconductor layer and overlying the patterned hard mask layer and the sidewall portion of the fins, forming a second dielectric layer on the first dielectric layer, forming a third dielectric layer on the second dielectric layer, and etching back the third dielectric layer to form a spacer on sidewalls of the second dielectric layer.

In one embodiment, the method may further include removing a portion of the second dielectric layer that is not covered by the spacer while exposing an upper surface portion of the first dielectric layer over the planarized third semiconductor layer, and removing the spacer and the patterned hard mask.

In one embodiment, the first dielectric layer includes Si₃N₄, the second dielectric layer includes SiO₂, and the third dielectric layer includes Si₃N₄. In one embodiment, the first dielectric layer has a thickness of about 100 nm, the second dielectric layer has a thickness of about 100 nm, and the third dielectric layer has a thickness of about 400 nm. Each of the first, second, and third dielectric layers can be formed by PECVD at a temperature of about 300° C.

Numerous benefits are achieved by way of the present invention over conventional techniques. For example, embodiments of the present invention provide methods and systems that utilize (1) a graded doping region as landing zone for etching of the vertical fin, thereby minimizing the impact of etch depth variation in the etch process on the on-resistance and gate-to-source capacitance of the FET, (2) a self-aligned source contact to reduce or eliminate alignment issues in the contact formation and thereby minimize parasitic capacitances, and (3) an epitaxially-regrown gate layer on the graded doping region with a ternary III-V compound on a binary III-V compound substrate.

The difference between the lattice constant of the ternary III-V compound gate layer and the binary III-V compound substrate and the induced strain generates a polarization charge which results in a two-dimensional electron gas (2DEG) at the interface with the gate layer. The 2DEG enables a current to first flow substantially in the horizontal direction along the lateral bottom surface of the gate layer, then in the vertical direction through the drift region, thereby reducing spreading resistance in the device and reducing the device specific on resistance. By controlling the etched depth into the graded doping region, the drain-source ON resistance, the threshold voltage, the electric field and the drain-source leakage current can kept within a desired range. Additionally, some embodiments include applications to merged p-i-n/Schottky (MPS) diodes and to vertical MOSFETs. In particular, the use of an epitaxially regrown ternary III-V compound as the p-type region in an MPS diode can reduce the on-voltage of the diode. The graded doping region landing zone has similar advantages for vertical MOSFETs as for vertical JFETs, and the self-aligned source contact can also be applied to vertical MOSFET structures. These and other embodiments of the invention along with many of its advantages and features are described in more detail in conjunction with the text below and attached figures.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings form a part of the present disclosure, that describe exemplary embodiments of the present invention. The drawings together with the specification will explain the principles of the invention.

FIG. 1 is a cross-sectional view of a vertical-fin-based field effect transistor (FET) device according to an embodiment of the present disclosure.

FIG. 2 is a simplified cross-sectional view of a vertical-fin-based FET device illustrating current flow from a lateral direction along a two-dimensional electron gas (2DEG) to a vertical direction toward the substrate according to an embodiment of the present disclosure.

FIG. 3 is a simplified flowchart of a method of fabricating a vertical-fin-based FET device according to an embodiment of the present disclosure.

FIGS. 4A through 4D are cross-sectional views showing intermediate stages of methods of fabricating a vertical-fin-based FET device according to an embodiment of the present disclosure.

FIG. 5A through FIG. 5E are cross-sectional views showing intermediate stages of a method of fabricating a vertical-fin-based FET device according to a first embodiment of the present disclosure.

FIG. 6A through FIG. 6D are cross-sectional views showing intermediate stages of a method of fabricating a vertical-fin-based FET device according to a second embodiment of the present disclosure.

FIG. 7A through FIG. 7H are cross-sectional views showing intermediate stages of a method of fabricating a vertical-fin-based FET device that can be applied to the first and second embodiments of the present disclosure.

FIG. 8A is a simulation structure of a vertical-fin-based FET device having a 0.2 μm fin thickness.

FIG. 8B is a graph illustrating a threshold voltage (in V) of a vertical-fin-based FET device as a function of an etch offset (in μm).

FIG. 8C is a graph illustrating an electric field E (in MV/cm) of a vertical-fin-based FET device as a function of an etch offset (in μm).

FIG. 8D is a graph illustrating channel leakage (in A) of a vertical-fin-based FET device as a function of an etch offset (in μm).

FIG. 9A is a graph illustrating a current density for a normal etch. FIG. 9B is a graph illustrating a current density for a 0.1 μm overetch. FIG. 9C is a graph illustrating a current density for a 0.2 μm overetch.

FIG. 10A is a graph illustrating an electric field at the gate corner for a normal etch. FIG. 10B is a graph illustrating an electric field at the gate corner for a 0.1 μm underetch. FIG. 10C is a graph illustrating a current density for a 0.2 μm underetch. The high-field region (indicated by an ellipse in FIGS. 10B and 10C) are near the gate corner with the fin.

FIG. 11 is a graph illustrating the on-resistance Ron as a function of etch variation (μm) for the 0.2 μm graded epi.

FIG. 12 is a graph illustrating a threshold voltage Vt (V) as a function of etch variation (μm) for the 0.2 μm graded epi.

FIG. 13 is a graph illustrating a maximum electric field (MV/cm) as a function of etch variation (μm) for the 0.2 μm graded epi.

FIG. 14 is a graph illustrating a high-voltage drain leakage current Idss (A) at 1200V as a function of etch variation (μm) for the 0.2 μm graded epi.

FIG. 15 is a graph illustrating the on-resistance Ron (mΩ) as a function of etch variation (μm) for the 0.3 μm graded epi.

FIG. 16 is a graph illustrating a threshold voltage Vt (V) as a function of etch variation (μm) for the 0.3 μm graded epi.

FIG. 17 is a graph illustrating an electric field (MV/cm) as a function of etch variation (μm) for the 0.3 μm graded epi.

FIG. 18 is a graph illustrating a high-voltage drain leakage current Idss (A) at 1200V as a function of etch variation (μm) for the 0.3 μm graded epi.

FIG. 19A is a graph illustrating an effect of no polarization charge on the current density predicted to result at the c-plane In_(0.15)Ga_(0.85)N/GaN interface.

FIG. 19B is a graph illustrating an effect of the polarization charge predicted to result at the c-plane In_(0.15)Ga_(0.85)N/GaN interface according to some embodiments of the present disclosure.

FIG. 20A is a graph illustrating an effect of an electric field predicted to result at the interface between the c-plane In_(0.15)Ga_(0.85)N gate layer and the GaN drift layer.

FIG. 20B is a graph illustrating an effect of an electric field predicted to result at the c-plane In_(0.15)Ga_(0.85)N/GaN interface according to some embodiments of the present disclosure. The graph shows a relatively high electric field is formed due to the polarization in an off state.

FIG. 20C is a graph illustrating the off-state magnitude of electric field without polarization and with polarization.

FIG. 21A and FIG. 21B are graphs illustrating a current density through the channel of a baseline FET compared with that of a non-polar FET at 150 degrees C.

DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS

Embodiments of the present disclosure will be described more fully hereinafter with reference to the accompanying drawings. The disclosure may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. The features may not be drawn to scale, some details may be exaggerated relative to other elements for clarity. Like numbers refer to like elements throughout.

It will be understood that when an element such as a layer, region or substrate is referred to as being “on” or extending “onto” another element, it can be directly on or extend directly onto the other element or intervening elements may also be present. In contrast, when an element is referred to as being “directly on” or extending “directly onto” another element, there are no intervening elements present. It will also be understood that when an element is referred to as being “connected” or “coupled” to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being “directly connected” or “directly coupled” to another element, there are no intervening elements present.

Relative terms such as “below” or “above” or “upper” or “lower” or “horizontal” or “Lateral” or “vertical” may be used herein to describe a relationship of one element, layer or region to another element, layer or region as illustrated in the figures. It will be understood that these terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an”, and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises”, “comprising”, “includes”, and/or “including” when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

Embodiments of the present disclosure are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the invention. The thickness of layers and regions in the drawings may be enlarged relative to other layers and regions for clarity. Additionally, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and/or a gradient of implant concentration at its edges rather than a discrete change from implanted to non-implanted region. Likewise, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation takes place. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the invention.

Embodiments of the present disclosure now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. This disclosure may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Techniques, methods and devices known to one of ordinary skill in the relevant art may not be discussed in detail, but in situations in which these techniques, methods and apparatus apply, these techniques, methods and apparatus should be considered as part of this specification. Further, similar reference numerals and letters are used to refer to similar items in the following figures, and once an item is defined in one of the figures, it will not need to be explained further in the subsequent figures.

Embodiments of the present disclosure relates to vertical-fin-based field effect transistor (FET) devices. More particular, the present disclosure relates to vertical fin-based FET devices with improved leakage current, maximum electric field and on-resistance for a given threshold voltage. Merely by way of example, the present disclosure relates to methods and vertical transistor devices with a graded doping zone in the doped drift region, and a regrowth of epitaxial gate layer in direct contact with the graded doping zone. Many advantages can be obtained by having the epitaxially regrown gate layer on the graded doping zone, such as improved on-resistance, maximum electric field, current flow first in the lateral direction along the bottom interface layer of the gate layer than in the vertical direction through the drift layer toward the substrate.

FIG. 1 is a cross-sectional view of a vertical fin-based field effect transistor device 100 according to an embodiment of the present disclosure. The terms “FET,” “FinFET,” and “vertical fin-based FET” are interchangeable used herein. Referring to FIG. 1 , FET device 100 may include a semiconductor substrate 101, a drift layer 102 including a uniformly doped region 102 a on semiconductor substrate 101 and a graded doping region 102 b on uniformly doped region 102 a, and a plurality of fins 103 protruding from graded doping region 102 b. In one embodiment, each of the fins 103 may include a heavily doped layer 104 disposed in an upper portion of the fin and a refractory metal, refractory metal compound or refractory metal alloy layer (e.g., a TiN layer) 105 disposed on heavily doped layer 104. FET device 100 may also include a source contact structure 106 on metal layer (TiN) 105. Source contact structure 106 may include a titanium (Ti) layer 106 a on metal layer (TiN) 105, an aluminum (Al) layer 106 b on titanium (Ti) layer 106 a, and a barrier metal layer (e.g., molybdenum (Mo), titanium (Ti), tantalum (Ta), or similar) 106 c on aluminum (Al) layer 106 b.

FET device 100 may further include a gate layer 110 having a bottom portion in direct contact with graded doping region 102 b, a dielectric (e.g., silicon dioxide or silicon nitride) layer 111 disposed on gate layer 110 and surrounding fins 103, a gate contact structure 112 disposed on gate layer 110, a first interlayer dielectric layer 113 disposed on dielectric layer 111 and gate contact structure 112, and a second interlayer dielectric layer 114 disposed on first interlayer dielectric layer 113. In one embodiment, gate contact structure 112 may include a nickel (Ni) layer 112 a disposed on gate layer 110, a first gold (Au) layer 112 b disposed on nickel (Ni) layer 112 a, a barrier metal (e.g., molybdenum (Mo), titanium (Ti), tantalum (Ta), or similar) layer 112 c disposed on first gold (Au) layer 112 b, and a second gold (Au) layer 112 d disposed on barrier layer 112 c.

FET device 100 may also include a first via contact 115 extending through first and second interlayer dielectric layers 113, 114 and in contact with source contact structure 106, a second via contact 116 extending through first and second interlayer dielectric layers 113, 114 and in contact with gate contact structure 112, and a drain metal contact 117 on the bottom surface of semiconductor substrate 101. As used herein, the terms “drift layer” and “drift region” are used interchangeably, the terms “doped layer” and “doped region” are used interchangeably, and the terms “graded doping region” and “graded doping layer” are used interchangeably.

In some embodiments, semiconductor substrate 101 may include an N+ doped III-nitride material, fins 103 may include an N doped III-nitride material having a first dopant concentration, uniformly doped region 102 a of drift region 102 may include an N doped III-nitride material having a second dopant concentration lower than the first dopant concentration, and graded doping region 102 b having a third dopant concentration that increases (e.g., linearly) from the second dopant concentration to the first dopant concentration.

In one embodiment, the first dopant concentration is about 7.5×10¹⁶ atoms/cm³, and the second dopant concentration is about 1×10¹⁶ atoms/cm³.

In one embodiment, the drift region has a thickness of about 12 μm, the graded doping region has a thickness of about 0.3 μm, and the semiconductor fin has a height in a range between about 0.7 μm and 0.8 μm and a width of about 0.2 μm.

In one embodiment, gate layer 110 may include an In_(x)Ga_(1-x)N layer, where 0<x<1, i.e., x is between 0 and 1 and is not equal to 0 or 1. In one embodiment, gate layer 110 is disposed in a recess region between two adjacent fins and has a portion 110 a in contact with graded doping region 102 b. The depth (or the thickness) of portion 110 a of the gate layer may affect the threshold voltage, the conductance, the maximum electric field of the FET device. The effect of the depth (or thickness) of portion 110 a embedded in the graded doping region will be described in more detail below.

In one embodiment, the FET device 100 may include a substrate 101 which may include an N+ GaN material layer, a drain metal layer 117 disposed at its bottom surface, an N GaN drift layer 102 having a uniformly doped region 102 a disposed on substrate 101 and a graded doping region 102 b disposed on the uniformly doped region, and an epitaxial GaN layer disposed on the graded doping region and including a recess region for forming a plurality of fins 103. The FET device may also include a p-type GaN gate layer filling the recess region. The graded doping region 102 b may function as a landing pad to ensure sufficient contact for gate layer 110. In one embodiment, the gate layer may include a ternary compound semiconductor layer (e.g., an In_(x)Ga_(1-x)N layer, where 0<x<1). In one embodiment, portion 110 a of the gate layer 110 may have a depth (or thickness) of about 0.1 μm (+/−0.1 um) extending into graded doping region 102 b. The fins each may have a width of about 0.2 μm and are spaced from each other by a space of about 2.0 μm, i.e., the recess region or the gate layer filling the recess region between two adjacent fins has a lateral width of about 2.0 μm. The FET device may also include a two-dimensional electron gas (2DEG) layer 120 formed in an interface between gate layer 110 and graded doping region 102 b. The area surface of gate layer 110 is large, so that a current flows laterally along 2DEG layer 120 before flowing vertically toward drain metal layer 117 in the direction of the substrate, thereby improving the conductance (reducing the on-resistance) of the FET device. In other words, the channel FET device has two portions, with a first portion being a lateral channel that controls the current flow through the 2DEG layer, which distributes the current efficiently in the drift region, and a second portion being a vertical channel which carries the current vertically through the drift region toward substrate 101 and drain metal layer 117.

In one embodiment, each of the fins may include a metal layer 105 made of TiN and a multilayer source metal structure (e.g., stacked layers of Ti/Al or Ti/TiN/Alin which Ti is in contact with metal layer 105. The FET device may also include an insulating layer 111, e.g., a silicon dioxide or silicon nitride layer on gate layer 110, which may also be referred to as a dielectric layer. Insulating layer 111 includes an opening where a gate contact structure (gate electrode) 112 is formed in contact with gate layer 110. Gate contact structure (gate electrode) 112 has a multilayer structure of metals, e.g., Pd/Pt/Au, where Pd is in contact with gate layer 110, or Ni and Au, in which the Ni is deposited in contact with gate layer 110. Other embodiments can include other gate electrode metal structures known to those skilled in the art

In one embodiment, each of the fins may include an upper portion having sidewalls parallel to each other and substantially perpendicular to the surface of the substrate and a lower portion having sidewalls non-parallel to each other and forming an angle other than 90 degrees with the surface of the substrate. The parallel sidewalls may define a non-polar plane, such as an m-plane.

In one embodiment, the 2DEG layer is induced by a polarization between the gate layer and the drift region in a c-plane, and the current flowing vertically through the drift region is along an m-plane.

FIG. 2 is a simplified cross-sectional view of a vertical FET device 20 illustrating a current flow from a lateral direction along a 2DEG to a vertical direction toward the substrate according to an embodiment of the present disclosure. Referring to FIG. 2 , vertical FET device 20 may include a substrate 201, a drift layer 202 overlying substrate 201, a plurality of fins 203 protruding from a surface of drift layer 202, a gate layer 210 on drift layer 202 and surrounding the fins. FET device 20 may further include a gate electrode 212 on gate layer 210, and a dielectric layer (e.g., silicon dioxide) 211 on gate layer 210 and surrounding fins 203 and gate electrode 212. FET device 20 may also include a two-dimensional electron gas 220 where gate layer 220 meets drift layer 202 along the polar plane directions. FET device 20 may also include a source electrode 206 coupled to fins 203. FET device 20 is in an off-state when no electrical potential is applied to gate electrode 212.

When an electrical potential is applied to gate electrode 212, it modulates a continuous two-dimensional electron gas (2DEG) 220 that is electrically communicative with the drain electrode. The source current 231 flows laterally under gate layer 210 and vertically into drain electrode 217. In one embodiment, the fins each have a width of about 0.2 μm and spaced apart by a distance of about 2.0 μm. A polarization induced 2DEG 220 is formed in the interface between the gate layer and the graded doping region of the drift region, thereby distributing the current in the drift region to improve the conductance of the FET device.

Embodiments of the present disclosure further provide a method of fabricating a vertical FET device. FIG. 3 is a simplified flowchart of a method 300 of fabricating a vertical FET device with a regrown gate layer according to an embodiment of the present disclosure. Referring to FIG. 3 , a III-nitride substrate is provided (310). In an embodiment, the III-nitride substrate is an N+ GaN substrate having a resistivity in a range of about 0.020 ohm-cm. In one embodiment, the resistivity of the N+ GaN substrate may be from about 0.001 ohm-cm to 0.018 ohm-cm, preferably less than 0.016 ohm-cm, and more preferably, less than 0.012 ohm-cm. Method 300 also includes forming a first III-nitride epitaxial layer, for example, a 12 μm thick first III-nitride epitaxial layer (e.g., an N− GaN epitaxial layer deposited on the III-nitride substrate (312). The first III-nitride epitaxial layer is epitaxially grown on the III-nitride substrate at a temperature between 950 and 1100° C. and is characterized by a first dopant concentration, e.g., N-type doping with a dopant concentration of about 1×10¹⁶ atoms/cm³. In some embodiments, the first III-nitride epitaxial layer is a drift layer including a uniformly doped region (layer) on the III-nitride substrate and a graded doping region (layer) on the uniformly doped region. In an embodiment, the uniformly doped region has a thickness of about 12 μm, and the graded doping region has a thickness of about 0.3 micron. In an embodiment, the surface of substrate 310 is miscut from the c-plane at an angle to facilitate high-quality epitaxial growth for high-voltage operation of the drift layer.

Method 300 further includes forming a second III-nitride epitaxial layer on the first III-nitride epitaxial layer (314). In an embodiment, the second III-nitride epitaxial layer is epitaxially grown on the first III-nitride epitaxial layer with a thickness of about 0.7 μm and is characterized by a second dopant concentration, e.g., N-type doping. The second dopant concentration is higher than the first dopant concentration in some embodiments. In an embodiment, the second dopant concentration is about 1.3×10¹⁷ atoms/cm³. Method 300 further includes forming a metal layer on the second III-nitride epitaxial layer and a patterned hard mask layer on the metal layer (316), and patterning the metal layer using the patterned hard mask layer as a mask. Method 300 further includes forming a recess region in the second III-nitride epitaxial layer using the patterned hard mask layer by an etch process, e.g., a reactive ion etching (RIE) process (318). Method 300 further includes regrowing a third III-nitride epitaxial layer in the recess region (320). The regrown III-nitride epitaxial layer may form a gate layer. In one embodiment, the regrown III-nitride epitaxial layer has a conductivity type opposite the conductivity type of the first and second III-nitride epitaxial layers.

Method 300 further includes forming a first dielectric layer on the regrown III-nitride epitaxial layer and on the patterned hard mask layer and a second dielectric layer on the first dielectric layer (322). Method 300 further includes removing a portion of the second dielectric layer to form a spacer on sidewalls of the first dielectric layer on opposite sides of an upper portion of the fins (324). Method 300 further includes removing a portion of the first dielectric layer to expose a surface portion of the regrown III-nitride epitaxial layer while leaving a portion of the first dielectric layer on opposite sides of the fins (326). Method 300 further includes removing the spacer and the hard mask layer while exposing a surface of the metal layer and keeping the portion of the first dielectric layer on opposite sides of the fins (328).

Method 300 further includes forming a source mask layer on the exposed surface portion of the regrown epitaxial III-nitride layer (330). Method 300 further includes forming a source contact structure on the surface of the metal layer and removing the source mask layer (332). Method 300 further includes forming a gate mask layer covering the source contact structure while exposing a surface portion of the regrown III-nitride epitaxial layer, forming a gate contact structure on the exposed surface portion of the regrown III-nitride epitaxial layer, and removing the gate mask layer (334). Method 300 further includes forming an interlayer dielectric layer covering the source contact structure and the gate contact structure, forming a patterned mask layer on an interlayer dielectric layer, etching the interlayer dielectric layer to form through holes extending to the source contact structure, and filling the through holes with a conductive material to form vias (336). It is noted that the through holes and vias to the gate contact structure can be formed concurrently with the formation of the through holes and vias to the source contact structure.

It should be appreciated that the specific steps illustrated in FIG. 3 provide a particular method of fabricating a vertical FET device with a regrown gate layer according to an embodiment of the present invention. Other sequences of steps may also be performed according to alternative embodiments. For example, alternative embodiments of the present invention may perform the steps outlined above in a different order. Moreover, the individual steps illustrated in FIG. 3 may include multiple sub-steps that may be performed in various sequences as appropriate to the individual step. Furthermore, additional steps may be added or removed depending on the particular application. One of ordinary skill in the art would recognize many variations, modifications, and alternatives.

Referring once again to FIG. 3 and with reference to FIGS. 4A through 4P, a method of fabricating a vertical FET device is described according to some embodiments of the present disclosure. Referring to FIG. 4A, an N+ doped III-nitride substrate 401 is provided (block 310). A first N− doped semiconductor (drift) layer 402 semiconductor layer 402 is epitaxially grown on substrate 401 (block 312) at a temperature between 950 and 1200° C., preferably between 1000 and 1150° C., and more preferably about 1100° C. A second N doped semiconductor layer 403 is epitaxially grown on first semiconductor layer 402 (block 314) at a temperature between 950 and 1200° C., preferably between 1000 and 1150° C., and more preferably about 1100° C. Referring to FIG. 4B, a metal layer 405 is formed on second semiconductor layer 403, and a patterned hard mask layer 406 is formed on metal layer 405 (block 316). In an embodiment, a hard mask layer may include Si₃N₄ and is formed with a thickness of about 400 nm by PECVD at about 300° C. In an embodiment, patterned hard mask layer 406 may be formed using RIE with F-based chemistry. In an embodiment, metal layer 405 is omitted.

In an embodiment, N+ doped III-nitride substrate 401 is heavily doped with N-type dopants in a dopant concentration in a range of about 5×10¹⁷ atoms/cm³ to about 1×10¹⁹ atoms/cm³ and a resistivity of less than 0.020 ohm-cm. In one embodiment, the resistivity of the N+ doped III-nitride substrate may be from about 0.001 ohm-cm to 0.018 ohm-cm, preferably less than 0.016 ohm-cm, and more preferably, less than 0.012 ohm-cm. First semiconductor layer 402 is a drift layer having a thickness of about 12 μm and a dopant concentration in a range of about 1×10¹⁶ atoms/cm³. Second semiconductor layer 403 is a fin conduction layer having a uniform doped region with N-type dopants of about 1.3×10¹⁷ atoms/cm³ and a thickness of about 12 μm. A graded doping region 4023 having a thickness of about 0.3 μm is disposed between the first and second semiconductor layers and has a dopant concentration that increases (e.g., linearly) from about 1×10¹⁶ atoms/cm³ to 1.3×10¹⁷ atoms/cm³, i.e., from the first semiconductor layer toward the second semiconductor layer. Metal layer 405 may include TiN, and hard mask layer 406 may include silicon nitride. In one embodiment, a heavily N+ doped layer 404 may be present between second semiconductor layer 403 and metal layer 405 to improve contact resistance between the second semiconductor layer and the metal layer. In the following drawings and figures, graded doping region 4023 and heavily N+ doped layer 404 are omitted for the sake of clarity.

Referring to FIG. 4C, an etch process is performed using the patterned hard mask 406 as a mask to form a plurality of fins 403′ and patterned metal contacts 405′ (block 318). In some embodiments, the fins each have a width of about 0.2 μm, a height in a range between about 0.7 μm and 0.8 μm, and are spaced apart from each other by a space of about 2 μm, i.e., the fin pitch is about 2 μm. To have uniform height of the fins, good controllability of the depth of the etch process is utilized. In accordance with the present disclosure, an etch process may include Cl-based chemistry using RIE and is carried out to remove a portion of second semiconductor layer 403 to form a recess region 408. In an embodiment, the etch process may stop when about 0.1 μm of graded doping region 4023 is removed. The use of the graded doping region to mitigate the electrical effects of the etch process variation or tolerance is critical as will be described in detail further below.

It is noted that the bottom portion of the fins may have a shape different form the shape shown in FIG. 4C after the etch process. Embodiments of the present disclosure are described herein with reference to cross-section illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the invention. The thickness of layers and regions in the drawings may be exaggerated for clarity. Additionally, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. In the following drawings, the bottom portion of the fins are shown as having a 90 degrees angle with the surface of the graded doping region, i.e., the fins are shown as having a cross-sectional rectangular shape. It is understood that the bottom portion of the fins may have rounded or curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the invention.

In one embodiment, after forming the trench, a cleaning process is carried using a TMAH solution of about 25% by weight, at a temperature of about 85° C., and for a duration of about 30 minutes. In another embodiment, prior to performing a cleaning using the TMAH solution, a pre-cleaning such as piranha clean using a H₂SO₄:H₂O in a volume ratio 2:1 for 2 minutes may also be performed.

Referring to FIG. 4D, after the cleaning, a third semiconductor layer 407 is epitaxially grown in recess region 408 (block 320). In an embodiment, third semiconductor layer 407 may include a p-type GaN layer that is grown non-conformally in the trench at a temperature of about 950° C. up to a thickness that is substantially planar to the bottom of patterned metal contacts 405′ (or hardmask 406, if patterned metal contacts 405′ are omitted). In one embodiment, the thickness of third semiconductor layer 407 is about 840 nm. The p-type GaN layer may be doped with Mg with a dopant concentration of about 1×10¹⁹ atoms/cm³. The p-type GaN layer may be doped with Mg with a dopant concentration of about 1×10¹⁹ atoms/cm³. Thereafter, a thermal anneal (e.g., a rapid thermal annealing in N₂ at 850° C. for 5 minutes) is performed to activate the Mg dopant atoms. The Mg atoms are then activated in the p-type GaN layer in an amount of greater than 10% by weight. In one embodiment, a heavily N+ doped layer (as shown in FIG. 4B) may be present between fins 403′ and patterned metal contacts 405′ to improve contact resistance between the second semiconductor layer and the metal layer

In a first embodiment, referring to FIG. 5A, a planarization process may be performed on third semiconductor layer 407. In an embodiment, the planarization process includes removing an upper portion of third semiconductor layer 407 by etching. In an embodiment, the planarization process includes removing about 0.2 μm of the upper portion of third semiconductor layer 407.

Thereafter, a first dielectric layer 410 a is formed on at least the planarized surface of fourth dielectric semiconductor layer 407, and substantially conformal to the sidewall of the fin, the patterned metal contacts 405′ and the hardmask 406. In an embodiment, the first dielectric layer 410 a has a thickness of approximately 100 nm and may include Si₃N₄ and be deposited by PECVD at about 300° C. A second dielectric layer 410 b is formed on first dielectric layer 410 a. In an embodiment, second dielectric layer 410 b has a thickness of approximately 100 nm and may include SiO₂ and be deposited by PECVD at about 300° C. A third dielectric layer 410 c is formed on second dielectric layer 410 b. In an embodiment, third dielectric layer 410 c has a thickness of approximately 400 nm and may include Si₃N₄ and be deposited by PECVD at about 300° C.

Referring to FIG. 5B, third dielectric layer 410 c is etched back to form a spacer 412 a on the sidewalls of second dielectric layer 410 b. In one embodiment, spacer 412 a has a width at the foot of about 300 nm.

Referring to FIG. 5C, second dielectric layer 410 b is etched using a substantially isotropic etch to expose the top of first dielectric layer 410 a over planarized region 407 and over hardmask 406. In one embodiment, the etch uses a wet etchant such as buffered HF. In another embodiment, the etch uses a F-based plasma etch. After etching, the remaining portion of second dielectric layer 410 b adjacent to spacer 412 a is denoted 410 b′.

Referring to FIG. 5D, third dielectric layer 410 c (spacer 412 a), first dielectric layer 410 a, and hardmask 406 are etched to expose the contact region over patterned metal contacts 405′. In one embodiment, patterned metal contacts 405′ are omitted, and the contact region is the top of fin 403′.

Referring to FIG. 5E, the remaining portion of second dielectric layer 410 b′ is etched to expose the remaining surface of first dielectric layer 410 a.

FIG. 6A through FIG. 6D are cross-sectional views showing intermediate stages of a method of fabricating a vertical-fin-based FET device according to a second embodiment of the present disclosure. In the second embodiment, referring to FIG. 6A, a planarization process may be performed on third semiconductor layer 407. In an embodiment, the planarization process includes removing an upper portion of third semiconductor layer 407 by etching. In an embodiment, the planarization process includes removing about 0.2 μm of the upper portion of third semiconductor layer 407. Thereafter, a first dielectric layer 410 is formed on the planarized surface of fourth semiconductor layer 407, and a second dielectric layer 411 is formed on first dielectric layer 410 (block 322). In an embodiment, first dielectric layer 410 may include SiO₂ and be deposited by PECVD at about 300° C. Second dielectric layer 411 may include Si₃N₄ and be deposited by PECVD at about 300° C.

Referring to FIG. 6B, second dielectric layer 411 is etched back to form a spacer 412 having a thickness of about 2000 angstroms on sidewalls of first dielectric layer 410 (block 324). In one embodiment, first dielectric layer 410 is also etched back by a certain depth such that the upper surface of first dielectric layer 410 is within the thickness of hard mask layer 406, as shown in FIG. 6B.

Referring to FIG. 6C, first dielectric layer 410 is further etched back exposing an upper surface of fourth semiconductor layer 407 (block 326). In an embodiment, first dielectric layer 410 may be over-etched by an amount of 50% to expose an upper surface and a portion of sidewalls of hard mask layer 406.

Referring to FIG. 6D, hard mask layer 406 and spacer 412 are removed while retaining the remaining portion of first dielectric layer 410 (block 328).

FIG. 7A through FIG. 7H are cross-sectional views showing intermediate stages of a method of fabricating a vertical fin-based FET that can be applied to the first and the second embodiment. For illustration purposes, FIG. 7A through 7H show the application to the second embodiment and those skilled in the art can readily apply the same intermediate stages to the first embodiment. Referring to FIG. 7A, a source mask layer 415 is formed overlying the exposed upper surface of fourth semiconductor layer 407 and having an opening 415 a exposing a portion of first dielectric layer 410 and an upper surface of fins 403′ (block 330). Source mask layer 415 also has an overhang 415 b extend over opening 415 a. In an embodiment, source mask layer 415 is lift-off capable and has a bottom CD of 0.65 μm and a top CD of 0.55 μm.

Referring to FIG. 7B, a source metal contact structure 416 is formed by deposition at a temperature of about 150° C. on the exposed upper surface of fins 403′ (block 332). In an embodiment, source metal contact structure 416 may include a stack structure comprising a first source metal layer 416 a on a metal layer on the upper surface of fins 403′, a second source metal layer 416 b on first source metal layer 416 a, and a third source metal layer 416 c on second source metal layer 416 b. In an embodiment, first source metal layer 416 a includes Ti having a thickness of about 25 nm, second source metal layer 416 b includes Al having a thickness of about 100 nm, and third source metal layer 416 c includes Mo having a thickness of about 40 nm. In another embodiment, second source metal layer 416 b includes TiN and third source metal 416 c includes Al. In another embodiment, second source metal layer 416 b includes TiN and third source metal 416 c is omitted. After forming the source metal contact structure, source mask layer 415 is dissolved to lift off the metal layers deposited thereon, while the metal layers deposited on the upper surface of the fins remain intact. In another embodiment, mask layer 415 is applied in reverse tone after deposition of source metal contact structure 416, and source metal contact structure 416 is etched (e.g., using RIE) except where reverse-tone mask layer 415 is present. Mask layer 415 is then removed. Source metal contact structure 416 formed below opening 415 a will have a width of approximately 0.65 μm corresponding to the width of the opening. In an embodiment, a rapid temperature annealing (RTA) treatment may be performed in N₂ at 850° C. for 5 minutes. After the RTA treatment, the source metal contact structure will have a specific resistance of less than about 10⁻⁵ ohm-cm².

In some embodiments, a junction-terminated edge (JTE) structure is formed outside the FET device active area by implantation (e.g., implanting nitrogen (N) or argon (Ar)) to enable stable high-voltage operation of the device.

Referring to FIG. 7C, a gate metal mask layer 420 is formed overlying the exposed upper surface of the source metal structure and having an opening 420 a exposing a surface portion of fourth semiconductor layer 407 (block 334). Gate metal mask layer 420 also has an overhang 420 b extending over opening 420 a. In an embodiment, gate metal mask layer 420 is lift-off capable and has a bottom CD of 0.9 μm and a top CD of 0.8 μm.

Referring to FIG. 7D, a gate metal contact structure 421 is formed by deposition through opening 420 a onto the exposed surface portion of fourth semiconductor layer 407. In an embodiment, gate metal contact structure 421 may include a stack structure comprising a first gate metal layer 421 a on the surface portion of fourth semiconductor layer 407, a second gate metal layer 421 b on first gate metal layer 421 a, a third gate metal layer 421 c on second gate metal layer 421 b, and a fourth gate metal layer 421 d on third gate metal layer 421 c. In an embodiment, first gate metal layer 421 a includes Ni, second gate metal layer 421 b includes Au, third gate metal layer 421 c includes Mo, and fourth gate metal layer 421 d includes Au. In another embodiment, gate metal layers 421 c and 421 d are omitted, and first gate metal layer 421 a includes Ni and second gate metal 421 b includes Au. In another embodiment, gate metal layer 421 d is omitted, and first gate metal layer 421 a includes Pd, second gate metal 421 b includes Pt, and third gate metal layer 421 c includes Au. After forming the gate metal contact structure, gate mask layer 420 is dissolved to lift off the metal layers deposited on the gate mask layer while the metal layers deposited on the surface portion of fourth semiconductor layer 407 remain intact.

Referring to FIG. 7E, gate metal mask layer 420 is removed (block 334) and a thermal anneal is performed to provide a stable low contact resistance In an embodiment, a rapid thermal annealing (RTA) treatment may be performed in O₂ at 500° C. for 10 minutes. After the thermal treatment, the gate metal contact structure will have a specific resistance of less than about 10⁻³ ohm-cm².

Referring to FIG. 7F, a first interlayer dielectric layer 425 is deposited covering the gate metal contact structure, the source metal contact structure, and the surface of the fourth semiconductor layer, using a plasma enhanced chemical vapor deposition (PECVD) process at a temperature of 300° C. First interlayer dielectric layer 425 is relatively conformal. In an embodiment, layer 425 has a thickness of approximately 50 nm and may include nitride (e.g., silicon nitride). Next, a second interlayer dielectric layer 426 is deposited on first interlayer dielectric layer 425 using a plasma enhanced chemical vapor deposition (PECVD) process at a temperature of 300° C. (block 336). Second interlayer dielectric layer 426 has a thickness of approximately 50 nm and may include oxide (e.g., silicon oxide).

Referring to FIG. 7G, a patterned photoresist layer 427 is formed over second interlayer dielectric layer 426, which can be planarized or un-planarized. Patterned photoresist layer 427 is formed and patterned with well-known photolithography processes to define locations where a via hole 428 is to be formed. Next, first and second interlayer dielectric layers 425, 426 are etched until an upper surface of the source metal contact structure is exposed. In some embodiments, a via hole to the gate metal contact structure may also be formed concurrently with via hole 428 for the source metal contact structure. In an embodiment, the via hole has a CD of approximately 0.45 μm.

Next, patterned photoresist layer 427 is removed. Referring to FIG. 7H, a conductive material 429 is formed filling via hole 428, and a pad metal deposition is performed on the filled via hole by evaporation to a thickness of about 4 μm (block 336). The above described method of fabricating a vertical fin-based FET is advantageous in that a metal, metal alloy, or metal compound layer (e.g., TiN) is formed on the fin epitaxial layer followed by a hard mask layer.

FIG. 8A is a cross-sectional view of a simulation cell structure using a 0.2 μm fin thickness. The nominal etch depth is 0.1 μm below the bottom of the fin layer (0.1 μm into the graded zone). Etch depth variations of +/−0.1 μm around the nominal were simulated, as well as a graded zone thickness of 0.2 μm for the second round and 0.3 μm for the third round of simulations.

FIG. 6 is a graph illustrating a threshold voltage (in V) of a vertical fin-based FET device as a function of an etch offset (in μm) for a 0.3 μm fin and ungraded epitaxial layer. The “0” in the x-axis represents the epitaxial layer between the fin and the drift region. The right side of “0” means an overetch into the drift region below the fin layer, and the left side of “0” means an underetch. The y-axis represents the voltage threshold (V). Referring to FIG. 8C, an overetch into the drift region below the fin layer results in a dramatic increase in the voltage threshold. Referring to FIGS. 8B and 8C, the inventors discovered the acceptable limit for the conductance and the threshold voltage is about 0.1 μm.

FIG. 8C is a graph illustrating an electric field E (in MV/cm) of a vertical fin-based FET device as a function of an etch offset (in μm) for a 0.3 μm fin and ungraded epitaxial layer. The “0” in the x-axis represents the epitaxial layer between the fin and the drift region. The right side of “0” means an overetch into the drift region below the fin layer, and the left side of “0” means an underetch. The y-axis represents the electric field E (MV/cm). An underetch of the epitaxial layer (i.e., above the interface with the drift layer) results in a significant increase of the maximum E field. That is, the breakdown risk increases with an underetch of 0.1 μm or more.

FIG. 8D is a graph illustrating channel leakage (in A) of a vertical fin-based FET device as a function of an etch offset (in μm) for a 0.3 μm fin and ungraded epitaxial layer. The “0” in the x-axis represents the epitaxial layer between the fin and the drift region. The right side of “0” means an overetch into the drift region below the fin layer, and the left side of “0” means an underetch. The y-axis represents the drain-source leakage current Idss (A). Referring to FIG. 8D, there is no significant impact of the etch variation on the leakage current.

FIGS. 9A through 9C are graphs illustrating a current density (A/cm²) as a function of position relative to the fin for a normal etch for a 0.3 μm fin and ungraded epitaxial layer. The fin is at the right. The solid horizontal line is the nominal etch depth, and the dashed yellow line 1001 shows the fin/drift region interface. The x-axis represents the position of the current density in μm relative to the fin, where “1” is the middle of the fin. The y-axis represents the position of the etched drift region relative to the gate layer, where “0” is the upper surface of the gate layer, and “0.8” is the nominal bottom position of the gate layer. Referring to FIG. 9A, for a nominal etch (also the gate layer bottom), i.e., the etch depth is 0.8 μm at the interface with the drift region, the high current density is around the interface between the gate layer bottom the fin bottom, and the threshold voltage is in a nominal range. FIG. 9B is a graph illustrating a current density for a 0.1 μm overetch. The interface with the gate layer bottom is at 0.9 μm. The threshold voltage is high as indicated by the strip 1002. FIG. 9C is a graph illustrating a current density for a 0.2 μm overetch. The threshold voltage is worse as indicted by the strip 1003. The results are also confirmed in FIG. 6 , which shows a significant increase in the threshold voltage at 0.2 μm overetch.

FIGS. 10A through 10C are graphs illustrating an electric field at the gate corner for different etch conditions. The nominal etch condition is indicated by the block denoted “N/N-Interface.” FIG. 10A is a graph illustrating the electric field 1101 having a nominal value at the gate corner for a normal etch. The double arrow 1102 shows the heavily doped region below the interface with the gate layer. FIG. 10B is a graph illustrating an electric field 1103 at the gate corner for a 0.1 μm underetch. The double arrow 1104 shows a portion of the heavily doped region (denoted by the double arrow 1104) is disposed between the gate layer and the underetch region, which may cause a high electric filed at the gate corner. FIG. 10C is a graph illustrating ab electric field for a 0.2 μm underetch. The heavily doped region (indicated by the double arrow 1106) is entirely disposed in the underetched region. The results are also shown in FIG. 8D.

0.2 μm Fin with 0.2 μm Graded Epi

FIG. 11 is a graph illustrating the drain-source on-resistance Ron as a function of etch variation (μm) for the 0.2 μm graded epitaxial layer. “0” is the middle of the 0.2 μm graded epitaxial layer between the fin and the drift regions. Ron increases significantly with 0.1 μm overetch. Referring to FIG. 11 , the Ron upper limit “USL” (upper specification limit) is reached at about 0.05 μm overetch. That is, when the etch variation is within the range between +/−1 0.1 μm, the on-resistance value will be outside the upper specification limit.

FIG. 12 is a graph illustrating a threshold voltage Vt (V) as a function of etch variation (μm) for the 0.2 μm graded epitaxial layer. “0” is the middle of the 0.2 μm graded epitaxial layer between the fin and the drift regions. Similar to the Ron, the threshold voltage Vt increases significantly with 0.1 μm overetch. That is, when the graded doping zone is overetched, the threshold value may increase to an unacceptable value. Referring to FIGS. 11 and 12 , an underetch does provide an improvement in the on resistance and threshold voltage. The underetch also provides an improvement of the electric field and leakage current, as shown in FIGS. 13 and 14 below.

FIG. 13 is a graph illustrating a maximum electric field (MV/cm) as a function of etch variation (μm) for the 0.2 μm graded epitaxial layer. The 0.2 μm graded epitaxial layer does provide an improvement in the electric field with underetch, by allowing the nominal etch to end in the graded doping layer. The 0.1 μm underetch case is now similar to the nominal case in the first round of simulations, with a slight increase in the electric field because of the additional charge in the graded doping layer.

FIG. 14 is a graph illustrating a high-voltage drain leakage current Idss (A) at 1200V as a function of etch variation (μm) for the 0.2 μm graded epi. Referring to FIG. 14 , the high-voltage drain leakage current Idss remains well controlled with the graded epitaxial layer. That is, an overetch or underetch does not affect the leakage current.

0.2 μm Fin with 0.3 μm Graded Epitaxial Layer

The inventors conducted a third simulation round using the 0.2 μm fin with a 0.3-μm thick linearly graded epitaxial layer inserted between the fin epitaxial layer and the drift region. In the third simulation round, the nominal etch depth was kept at 0.1 μm below the fin epitaxial layer bottom, and the results are shown in FIGS. 16 through 19 .

FIG. 15 is a graph illustrating the drain-source on-resistance Ron (mΩ) as a function of etch variation (μm) for the 0.3 μm graded epitaxial layer. Referring to FIG. 15 , the on-resistance Ron was well controlled over the +/−1 μm range. Referring to FIG. 15 , the on-resistance Ron increases by about 10% with the 0.1 μm overetch, which is acceptable and much less than the 0.2 μm graded epitaxial layer (see FIG. 11 ) used in the second set of simulations.

FIG. 16 is a graph illustrating a threshold voltage Vt (V) as a function of etch variation (μm) for the 0.3 μm graded epi. Referring to FIG. 16 , the threshold voltage Vt was well controlled over the +/−1 μm range. The threshold voltage Vt increase by about 10% with the 0.1 overetch, which is acceptable and much less than the threshold voltage Vt illustrated in FIG. 12 for the structure utilizing 0.2 μm graded epi used in the second set of simulations.

FIG. 17 is a graph illustrating an electric field (MV/cm) as a function of etch variation (μm) for the 0.3 μm graded epi. Referring to FIG. 17 , the electric field is higher with the 0.3 μm graded region. At the 0.1 μm underetch condition, the electric field is about 3.15 MV/cm (at the borderline), i.e., the maximum electric field is marginal at the minimum etch depth. The borderline or marginal condition will need some additional optimization, either through a change in the grading or re-centering of the nominal etch depth.

FIG. 18 is a graph illustrating a high-voltage drain leakage current Idss (A) at 1200V as a function of etch variation (μm) for the 0.3 μm graded epi. Referring to FIG. 18 , the high-voltage drain leakage current Idss was well controlled over the simulated etch range.

In summary, the inventors have determined that using an abrupt fin-epitaxial layer to drift region doping transition, the expected fin-etch depth process variation will cause unacceptable variations in the drain-source on-resistance Ron, and the threshold voltage Vt and breakdown voltage. Inserting a graded-doping zone as a transition layer between the fin-epitaxial region and the drift region significantly improves the parameter variation with etch process variation. A linearly-graded 0.3 μm transition zone achieves good control over the drain-source on-resistance Ron and Vt variations. The electric field is high, and the grading (or etch depth) is optimized by embodiments of the present invention to reduce the electric field levels to about 3 MV/cm.

In one embodiment, an existing Silvaco TCAD model for the FET device was modified to use In_(0.15)Ga_(0.85)N material in the gate region. Expected polarization charge at the In_(0.15)Ga_(0.85)N/GaN interface was calculated using material models and a strain calculation.

Table 1 shows calculated charge components for the In_(0.15)Ga_(0.85)N/GaN interface.

TABLE 1 In_(0.15)Ga_(0.85)N/GaN Spontaneous, P_(sp) 2.197e13 cm⁻² Piezoelectric, P_(pz) −1.117e13 cm⁻² Net, P_(total) 1.08e13 cm⁻²

It is assumed that this polarization charge occurs on the c-plane, but not on the channel sidewall (m-plane), following the typical behavior of III-N heterointerfaces on these planes.

FIG. 19A is a graph illustrating an effect of no polarization charge on the current density predicted to result at the c-plane In_(0.15)Ga_(0.05)N/GaN interface. The graph shows a 2D cross section of total current density for the case where polarization is not included. Referring to FIG. 19A, a current 2001 flows from the channel region between the fin and the gate region toward the drift region without sufficiently spreading horizontally through the interface between the In_(0.15)Ga_(0.85)N gate region and the GaN drift region. FIG. 19B is a graph illustrating an effect of the polarization charge predicted to result at the c-plane In_(0.15)Ga_(0.85)N/GaN interface according to some embodiments of the present disclosure. The graph shows a 2D cross section of total current density for the case where polarization is included. The net positive fixed charge at the interface due to polarization is expected to attract equal and opposite mobile charge (2D electron gas). The 2DEG at this location results in greater current spreading at the channel opening to the drift layer. Referring to FIG. 19B, the current 2003 flows horizontally along a lateral surface of the bottom portion of the gate layer via a two-dimensional electron gas (2DEG), which is induced by polarization of the In_(0.15)Ga_(0.85)N/GaN interface in the c-plane, then vertically in a direction toward the substrate and the drain metal contact through the drift region. This can provide significant advantages of smaller device sizes and lower costs over existing devices that do not include polarization.

FIG. 20A is a graph illustrating an effect of an electric field predicted to result at the interface between the c-plane In_(0.15)Ga_(0.85)N gate layer and the GaN drift layer. A relatively low electric field is formed uniformly between the gate layer (region) and the drift layer (region) in an off state. FIG. 20B is a graph illustrating an effect of an electric field predicted to result at the c-plane In_(0.15)Ga_(0.85)N/GaN interface according to some embodiments of the present disclosure. The graph shows a relatively high electric field is formed due to the polarization in an off state.

FIG. 20C is a graph illustrating the off-state magnitude of electric field without polarization 2111 and with polarization 2112. Referring to FIG. 20C, a vertical cutline 2113 through the non-channel (pn-junction region) is illustrated. The presence of the 2DEG due to polarization results in high electric field at the interface in the off-state.

Table 2 illustrates simulated electrical parameters of a baseline GaN FinFET vs. an In_(0.15)Ga_(0.85)N gate FinFET which includes polarization.

TABLE 2 Baseline FinFET InGaN FinFET with polar Ichannel 0.8 0.8 Nchannel 1.30E+17 1.30E+17 Graded landing yes yes Fin width (μm) 0.2 0.2 Vth (V)  1.23  1.15 IDSS@1200 V (A) 8.70E−12 7.10E−12 Max E (MV/cm)  2.92 4.5 Max E || (MV/cm) 2.4 2.4 Conductance/unit trench 6.55E−08 6.60E−0.8 (S/cm)

As has been demonstrated in FIG. 19A, FIG. 19B, FIGS. 20A through 20C, and Table 2 above, the use of 15% InGaN is shown to be capable of providing the benefits expected (lower threshold voltage Vth 1.15 V vs. 1.23V), but with a tradeoff of increased E-field (4.5 MV/cm vs. 2.92 MV/cm) in the off-state. It suggests using a lower percentage In, which results in lower polarization charge, or even negligible polarization. Accordingly, simulation results for a non-polar InGaN FINFET structure are shown below.

Table 3 illustrates simulated electrical parameters of a baseline GaN FinFET vs. a non-polar InGaN gate FinFET.

TABLE 3 Baseline FinFET InGaN FinFET non-polar Ichannel 0.8 0.8 Nchannel 1.30E+17 1.30E+17 Graded landing yes yes Fin width (μm) 0.2 0.2 Vth (V)  1.23  1.15 IDSS@1200 V (A) 8.70E−12 7.10E−12 Max E (MV/cm)  2.92 2.6 Max E || (MV/cm) 2.4 2.4 Conductance/unit trench 6.55E−08 6.60E−0.8 (S/cm)

Referring to Table 3, the use of InGaN results in a −0.08V threshold voltage shift (1.15V vs. 1.23V) with a low electric field (2.6 MV/cm vs. 2.92 MV/cm). The channel doping can be re-tuned to return to the baseline threshold voltage, resulting in very little electrical difference between the structures. The advantage for InGaN will be lower temperature growth and better ohmic contact and p-type doping.

FIG. 21A and FIG. 21B are graphs illustrating the current density through the channel of the FET (FIG. 21A) and the associated band diagram of the gate and drift region adjacent to the channel of the FET (FIG. 21B). In both figures, a baseline FET (curve 2411) characteristic is compared with that of a non-polar FET (curve 2412) at 150 degrees C. In FIG. 21A, a vertical cutline of current density through the channel is shown, and FIG. 21B shows the band diagram for a vertical section under the gate into the drift region in a non-channel region adjacent to the FET channel.

According to embodiments of the present invention, FinFETS with p-type gate regions utilizing InGaN (e.g., in place of GaN) are provided. The utilization of InGaN for the p-type gate material provides a number of benefits not available using conventional techniques. For example, some process flows described herein utilize the lower growth temperature of InGaN compared to GaN, which serves to protect the regrowth hard mask utilized during the regrowth process. Moreover, some embodiments utilize magnesium doping in which the Mg dopant is shallower in the InGaN layer, resulting in a higher ionization of the dopant at the same temperature. In addition, the lower bandgap of InGaN assists in the formation of ohmic contacts to the p-type region.

Embodiments of the present invention consider the effect of polarization to achieve a desired trade-off between current spreading and high electric field, which has been demonstrated.

The embodiments disclosed herein are not to be limited in scope by the specific embodiments described herein. Various modifications of the embodiments of the present invention, in addition to those described herein, will be apparent to those of ordinary skill in the art from the foregoing description and accompanying drawings. Further, although some of the embodiments of the present invention have been described in the context of a particular implementation in a particular environment for a particular purpose, those of ordinary skill in the art will recognize that its usefulness is not limited thereto and that the embodiments of the present invention can be beneficially implemented in any number of environments for any number of purposes. 

What is claimed is:
 1. A method of fabricating a vertical fin-based field effect transistor (FET), the method comprising: providing a semiconductor substrate having a first surface and a second surface, the semiconductor substrate having a first conductivity type; epitaxially growing a first semiconductor layer on the first surface of the semiconductor substrate, the first semiconductor layer having the first conductivity type and including a drift layer and a graded doping layer on the drift layer; epitaxially growing a second semiconductor layer having the first conductivity type on the graded doping layer; forming a metal compound layer on the second semiconductor layer; forming a patterned hard mask layer on the metal compound layer; etching the metal compound layer and the second semiconductor layer using the patterned hard mask layer as a mask exposing a surface of the graded doping layer to form a plurality of fins surrounded by a trench; and terminating the etching in the graded doping layer.
 2. The method of claim 1, further comprising: epitaxially growing a third semiconductor layer having a second conductivity type opposite the first conductivity type in the trench; etching back the third semiconductor layer to expose a sidewall portion of the plurality of fins; forming a silicon dioxide layer on the etched-back third semiconductor layer and overlying the patterned hard mask layer and sidewall portion of the plurality of fins, the silicon dioxide layer having an elevated portion in a vicinity of the plurality of fins; forming a silicon nitride layer on the silicon dioxide layer; isotropically etching the silicon nitride layer and the silicon dioxide layer to expose an upper surface of the silicon dioxide layer and to form a silicon nitride spacer on sidewalls of the elevated portion of the silicon dioxide layer; removing a portion of the silicon dioxide layer that is not covered by the silicon nitride spacer while exposing a first surface portion of the third semiconductor layer; and removing the silicon nitride spacer and the patterned hard mask layer.
 3. The method of claim 2, further comprising: forming a patterned source mask overlying an exposed surface of the second semiconductor layer and exposing a surface of the metal compound layer; forming a source stack structure comprising Ti, Al, and Mo from bottom to top on the metal compound layer; and removing the patterned source mask.
 4. The method of claim 3, further comprising: forming a gate mask on the source stack structure and the elevated portion of the silicon dioxide layer while exposing a second surface portion of the third semiconductor layer; forming a gate structure on the exposed second surface portion of the third semiconductor layer; and removing the gate mask.
 5. The method of claim 4, wherein the gate structure comprises a metal stack comprising Ni, Au, Mo, Au arranged from bottom to top.
 6. The method of claim 4, further comprising: forming a nitride interlayer dielectric layer overlying the source stack structure, the gate structure, and an exposed surface of the second semiconductor layer; forming an oxide interlayer dielectric layer overlying the nitride interlayer dielectric layer; forming a patterned photoresist layer on the oxide interlayer dielectric layer; etching the oxide interlayer dielectric layer and the nitride interlayer dielectric layer using the patterned photoresist layer to form a via hole extending to the source stack structure; and filling the via hole with a conductive material.
 7. The method of claim 6, wherein the via hole has a diameter of about 0.45 μm.
 8. The method of claim 1, wherein the second semiconductor layer comprises In_(x)Ga_(1-x)N, where 0<x<1.
 9. The method of claim 1, further comprising forming a drain electrode on the second surface of the semiconductor substrate.
 10. The method of claim 1, wherein the semiconductor substrate comprises N+ GaN having a first dopant concentration, the second semiconductor layer comprising N GaN having a second dopant concentration lower than the first dopant concentration, the drift layer of the first semiconductor layer comprises N−GaN having a third dopant concentration lower than the second dopant concentration, and the graded doping layer of the first semiconductor layer comprises a fourth dopant concentration linearly increasing from the third dopant concentration to the second dopant concentration.
 11. The method of claim 1, wherein the drift layer has a thickness of about 12 μm, the graded doping layer has a thickness of about 0.3 μm, and the plurality of fins each have a thickness of about 0.7 μm and a width of about 0.2 μm and are spaced apart from each other by a space of about 2 μm.
 12. The method of claim 1, further comprising: removing the patterned hard mask layer; and forming source contacts on the surface of the metal compound layer of the plurality of fins. 